Response to Office Action or Amendment

• Author: Arti Kane
• Pages: 51-96

51

Response to Office

Action or Amendment

An Office Action is a document written by a patent examiner in

response to a patent application after the examiner has examined the

application. The Office Action cites prior art and gives reasons why

the examiner has allowed, or approved, the applicant’s claims and/or

rejected the claims.

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A CRASH COURSE ON U.S. PATENT LAW

52

PATENT [DOCKET NUMBER]

IN THE UNITED STATES PATENT AND TRADEMARK OFFICE

[SERIAL NUMBER] [CONFIRMATION NUMBER]

[APPLICANT] [GROUP ART UNIT]

[FILING DATE] [EXAMINER]

[CUSTOMER NUMBER]

For: [TITLE]

Via EFS

Commissioner for Patents

P.O. Box 1450

Alexandria, VA 22313-1450

AMENDMENT UNDER 37 C.F.R. Section 1.111

Sir/Madam:

In response to the non-final Office Action dated [INSERT DATE],

please amend the above-identified application as indicated below.

Amendments to the claims are reflected in the listing of claims which

begins on page 2 of this paper; and

Remarks/Arguments begin on page 9 of this paper.

[APPLICATION NUMBER] [DOCKET NUMBER]

In Reply to non-final Office Action of [INSERT DATE]

AMENDMENTS TO THE CLAIMS

[THE BOILERPLATE LANGUAGE IS INDICATED IN BOLD.]

This listing of claims will replace all prior versions, and listings,

of claims in the application.

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Response to Office Action or Amendment 53

Listing of Claims:

[THE BRACKETS AND STRIKETHROUGH ARE USED TO DELETE

AN EXPRESSION AND THE UNDERLINES ARE USED TO ADD AN

EXPRESSION.]

1. (Currently Amended) A substrate processing apparatus

comprising:

a transport device [[unit]] including a substrate holder holding

unit configured to hold the substrate, a rotation driver driving

unit configured to rotate the substrate holder holding unit about

the center of the substrate holder holding unit as a rotational

axis, and a movement driver driving unit configured to move the

substrate holder holding unit horizontally;

a peripheral exposing device [[unit]] including an irradiation

device [[unit]] that irradiates light and configured to perform a

peripheral exposing process that exposes a peripheral portion

of the substrate by irradiating the light to the peripheral portion

of the substrate using the irradiation device [[unit]] while rotating

the substrate held by the substrate holder holding unit using the

rotation driver driving unit;

a substrate inspecting device [[unit]] including an image pick up

device imaging unit that picks up an image and configured to

perform a substrate inspecting process that inspects the sub-

strate based on the picked up image while moving the substrate

held by the substrate holder holding unit using the movement

driver driving unit; and

a controller control unit configured to control the substrate pro-

cessing apparatus including the transport device [[unit]], the

peripheral exposing device [[unit]], and the substrate inspecting

device [[unit]],

wherein the controller is programmed to control the trans-

port device, the peripheral exposing device and the substrate

inspecting device in order to perform a predetermined substrate

processing including either one of the peripheral exposing pro-

cess and the substrate inspecting process or both,

wherein the control unit controls a predetermined substrate pro-

cessing to be stopped when the peripheral exposing process is

included in the predetermined substrate processing and when

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